Semiconductor Modules by Tool Type

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Tools

• 2300 EX
• 2300 Versys - Conductor Etch
• 2300 Versys Kiyo - Conductor Etch
• 2300 Versys Star - Silicon Etch
• EX
• TCP 9400DFM - Silicon Etch
• TCP 9400DSiE - Deep Silicon Etch
• TCP 9600DFM - Conductor Etch

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