Semiconductor Modules by Tool Type

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Tools

  • 2365 High Resolution Imaging Inspection System
  • 2367 UV Line Monitoring
  • 2371 High-Resolution Imaging System
  • 2800 Series Broadband Brightfield DUV/UV/VIS Inspection
  • AIT UVTM High-Sensitivity Wafer Inspection
  • AIT X
  • Archer Series
  • ASET-F5X
  • eS30/eS31/eS32 Electrical Line Monitoring
  • Puma 9000 Series High-Throughput Patterned Wafer Inspection
  • QuantoX
  • Spectra Series
  • Surfscan SP1/SP2 DLS Unpatterned Surface Inspection
  • Viper 2430/2435 Automated macro-defect inspection
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