Semiconductor Modules by Tool Type

Start  » FSI  » Clean  » MAGELLAN Immersion Cleaning System

Below is a list of modules available for your tool type. For a sample data sheet of module specifications, click the module name. Contact us to order one of these modules, or with any questions you may have.

Modules

• Chemical Floor Module
• DI Floor Module
• Inert Gas Floor Module
• PCW Floor Module
• Sub-fab DI Utility Module
• Sub-fab Utility Module
• View Tile

• Semiconductor
  • Overview
  • About Modularization
  • Modules by Tool Type
• Life Sciences
  • Overview
  • Capabilities
  • Our Process
• About NEHP
  • Overview & Mission
  • Our People
  • Management
  • Press
• Contact Us