NEHP Patented Gas Floor Modules Being Assembled For Largest Semiconductor Foundry In North America
Largest US Semiconductor Manufacturing Facility
Drop In Floor Module Provides HPM Gas Point of Isolation
- Up to 9 Gas Sticks per Module
- SEMI S2/S6 Compliant
- NFPA 70 Compliant
- ANSI CGA Code Compliant
- FM 4910 Code Compliant
- Handles All HPM Gasses
- Dedicated N2 Purge Rail per stick
- Pyrophoric Gasses have UV/IR Detection and Sprinkler coverage
Year:
2011