Electronics

Process Gas Laterals

UHP process gas piping
PGS NEHP001
Electronics

Process gas laterals for semiconductor fab. Prefabricated in our Williston, Vermont clean rooms, certified, sealed and shipped to customer site for final installation.
Built from customer-supplied ISO's.

Water Treatment Skid

WTS-NEHP001
Electronics

Custom designed and built water treatment skid. Built in "modular" sections to be shipped and installed at customer site.

FM1 Series PCW Floor Module Using Evans "P-Stick" Components

PCW Hook-Up
CA-1101-R0
Electronics

This module is engineered and built to drop right into a 2 foot square opening in any raised floor within a semiconductor fabrication facility. It is used to completely replace the stick-built portion of the Process Cooling Water supplied to any type tool used in the industry. NEHP uses Evans "P-Stick" components for a clean, efficient and reliable design.

It can be ordered with header sizes up to 2"; various valve configurations such as ball or diaphragm; with or without pressure regulators; several types of connection points such as barbed fittings, NPT, PVC socket or quick-disconnects.

We can also custom design any type water module for your needs.

Please call us or use the contact form if you require further information.

  • Heavy Duty 1/4 inch powder-coated steel
  • Custom colors to match your application
  • Bullet-proof 1" thick lexan
  • Lockable latches for safety
Features: 
Field Replaceable PCW Sticks
Individual Flow, Balance, Pressure, Temperature & Shut-off for e
Robust Header and Stick Design
Replaces Standard Raised Floor Tiles
Available with Telescopic Frame or Full Containment Enclosure
Reduce on-Site Cost, Labor, and Risk
Technical data: 
Specifications
Temperature Rating:10°F (-12°C) to 200°F (90°C)*
Pressure Rating:150 psig (10 bar) @ 70°F (21°C)
Regulator Outlet Range (optional):10 psig (0.5 bar) to 100 psig (7 bar)

Bulk Gas Pressure Control/Filtration Skid

Bulk Gas Pressure Control/Filtration Skid
CA-1114-R0
Electronics

Contact us for information on this product:Contact Us

Features: 
Gas source pressure control, purification and monitoring
Reduces on-site labor and start-up time
Fully customizable or select from our standard configurations
Tested and certified ready for installation
Technical data: 
Specifications
FrameAluminum (std.), Stainless Steel
Tube Sizes1/2" to 4"
Tube Material316L Stainless Steel
Tube ID FinishAvailable 10 to 30 µ in Ra, Electropolished (optional)
application/pdf iconca-1114-r0.pdf

S2 Series Gas Sticks

for FM Series Modules
CA-1109-R0
Electronics
Features: 
Modular Design for FM Series Modules
Integrated Lockout/Tagout (LOTO)
HP grade Materials and Finishes
Customizable for Service and Capacity
Reduce on-Site Cost, Labor, and Risk
Technical data: 
Specifications
Temperature Rating:-40° to 160°F (-40° to 71°C)
Pressure Rating:250 psig (17 bar) inlet
Regulator outlet Range:Various ranges from 1 to 150 psig (0.1 to 10 bar)
Regulator Flow Coefficient:0.9Cv
Wetted Surface Roughness:< 15 μ in Ra, electropolished
end Connections:1⁄2”, 3⁄4” Dual Ferrule Compression
application/pdf iconca-1109-r0.pdf

S1 Series Gas Sticks

for FM Series Modules
CA-1108-R0
Electronics
Features: 
Modular Design for FM Series Modules
Integrated Lockout/Tagout (LoTo)
UHP grade Materials and Finishes
Customizable for Service and Capacity
Reduce on-Site Cost, Labor, and Risk
Technical data: 
Specifications
Temperature Rating:-20° to 140°F (-29° to 60°C)
Pressure Rating:250 psig (17 bar) inlet
Regulator outlet Range:Various ranges from Vacuum to 150 psig
Regulator Flow Coefficient:0.06 Cv
Wetted Surface Roughness:< 10 μ in Ra, electropolished
End Connections:1⁄4” Face Seal (VCR® or equivalent)
application/pdf iconca-1108-r0.pdf

FM2 Series Floor Module

Gas Hook-Up
CA-1107-R0
Electronics

The patented, NEHP FM2 Series Floor Module is designed and built to provide all control and distribution needs for inert gas supply to any type semiconductor equipment. It will drop directly into any raised floor, 2'x 4' opening after removing two existing floor tiles. It is essentially the same as our FM1 with the addition of regulators and additional valves.

It is easily maintained with standard, off-the-shelf components.

Notice the efficient, "tiered stacking" which maximizes the use of space.

It can be provided with a locking lid to make it safe from unauthorized access.

We also design control and monitoring capability to meet your needs as well.

Click on the link above the picture to download a spec sheet for this product.

Please call us or use the contact form if you require further information.

Features: 
Replaces Standard Raised Floor Tiles
Available with Telescopic Frame or Full Containment Enclosure
Superior Maintenance Access
Modular Stick Design
Reduce on-Site Cost, Labor and Risk
Technical data: 
Specifications
Frame:Carbon Steel
Finish:Powder Coat
Color:White Standard, Color Match Available (Contact Us)
Load Rating:1,000 lb. Point Load (LG lid option)
application/pdf iconca-1107-r0.pdf

FM1 Series Gas Floor Module

Gas Hook-Up
CA-1106-R0
Electronics

The patented, NEHP FM1 Series Floor Module is designed and built to provide all control and distribution needs for inert gas supply to any type semiconductor equipment. It will drop directly into any raised floor, 2'x 2' opening after removing the existing floor tile.

It is easily maintained with standard, off-the-shelf components.

Notice the efficient, "tiered stacking" which maximizes the use of space.

It can be provided with a locking lid to make it safe from unauthorized access.

We also design control and monitoring capability to meet your needs as well.

Click on the link above the picture to download a spec sheet for this product.

Please call us or use the contact form if you require further information.

Features: 
Replaces Standard Raised Floor Tiles
Available with Telescopic Frame or Full Modular Stick Design Containment Enclosure
Superior Maintenance
Modular Stick Design
Reduce on-Site Cost, Labor and Risk
Technical data: 
Specifications
Frame:Carbon Steel
Finish:Powder Coat
Color:White Standard, Color Match Available (Contact Us)
Load Rating:1,000 lb. Point Load (LG lid option)
application/pdf iconca-1106-r0.pdf

SUR Series Rack

Utility Hook-Up
CA-1104-R0
Electronics

The SUR series utility hookup rack is used either in the sub-fab or on the main floor to support the distribution & control of process water, inert gas, vacuum, nitrogen, deionized water etc. It is engineered & manufactured using the highest quality, industry-accepted materials and built to B31.3 standards.

The SUR series utility hookup rack is designed for ease of maintainability with off-the-shelf, easily replaced components and parts and can be built exactly for your application with future expansion needs in mind.

We also design control and monitoring capability to meet your needs as well.

We can also custom design any type utility rack based on unique or special requests.

Click on the link above the picture to download a spec sheet for this product.

Please call us or use the contact form if you require further information.

Features: 
PCW and N2 service for typical vacuum pump and chiller installations
Field replaceable PCW sticks
Adjustable supply pressure
Multiple frame types
Individual PCW Flow, Balance, and Shut-off for each connection
Reduce on-Site cost, Labor, and Risk
Technical data: 
Specifications
PCWN2
Temperature Rating:10°F (-12°c) to 200°F (90°c)*-20 to 165°F (-29 to 74°c)
Pressure Rating:150 psig (10 bar) @ 70°F (21°c)500 psig (35 bar) inlet
Regulator outlet Range:10-100 psig (0.5-7 bar)0-150 psig (0-10 bar)
application/pdf iconca-1104-r0.pdf

FM2 Series Floor Module

PCW Hook-Up
CA-1102-R0
Electronics

This module is engineered and built to drop right into a 2 by 4 foot opening in any raised floor within a semiconductor fabrication facility. It is used to completely replace the stick-built portion of the Process Cooling Water supplied to any type tool used in the industry. It is essentially the same as the FM 1, built side by side. It is available as drop-in or with telescoping, pedestal feet.

It can be ordered with header sizes up to 2"; various valve configurations such as ball or diaphragm; with or without pressure regulators; several types of connection points such as barbed fittings, NPT, PVC socket or quick-disconnects.

We can also custom design any type water module for your needs.

Click on the link above the picture to download a spec sheet for this product.

Please call us or use the contact form if you require further information.

  • Heavy Duty 1/4 inch powder-coated steel
  • Custom colors to match your application
  • Bullet-proof 1" thick lexan
  • Lockable latches for safety
Features: 
Field Replaceable PCW Sticks
Individual Flow, Balance, Pressure, Temperature & Shut-off for each connection
Robust Header and Stick Design
Replaces Standard Raised Floor Tiles
Available with Telescopic Frame or Full Containment enclosure
Reduce on-Site Cost, Labor, and Risk
Technical data: 
Specifications
Temperature Rating:10°F (-12°C) to 200°F (90°C)*
Pressure Rating:150 psig (10 bar) @ 70°F (21°C)
Regulator Outlet Range (optional):10 psig (0.5 bar) to 100 psig (7 bar)
application/pdf iconca-1102-r0.pdf
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