NEHP has announced the development of an integrated, modular exhaust gas handling system for semiconductor and PV manufacturing which addresses the need to bring exhaust systems online faster for tool hook-up while improving tool exhaust control setup time as well as reducing non-scheduled maintenance troubleshooting time. The NEHP Exhaust Header Module (patent pending) manages a variety of exhaust outputs on a standardized module platform, reducing on site hook-up labor hours and thereby speeding time to market for new tools.

“The benefits of this approach are numerous and significant,” said Adam Tarr, President and CEO of NEHP. “The manufacturing processes for a variety of OEM systems produce various byproducts whether caustic, toxic or hot gas; an improved methodology for managing each aspect of the waste stream creates very specific demands for safety, compliance and efficiency. By modularizing these process types into a single package, we have streamlined a major step in the tool installation and start-up process.”

Through standardizing exhaust outputs and setup, installations are simplified and tool hook-up becomes repeatable rather than custom to each tool. The header can be installed before the tool is on site taking the tool arrival out of the critical path timeline thereby reducing start-up time. Additionally, point of entry monitoring in an accompanying NEHP floor module makes exhaust setup easier, faster and more repeatable meeting the growing demand for tool matching. Having local readout and sensing and control capability at the module reduces non-scheduled downtime by allowing for quick troubleshooting of exhaust related issues and improves process performance where accurate control is necessary. NEHP, manufacturing the header module as a single component in our facility, offers superior quality control over site built systems and reduces the need for complex onsite routing by standardizing common tool exhaust installations across the fab.